Notice bibliographique
- Notice
Type(s) de contenu et mode(s) de consultation : Texte noté : électronique
Auteur(s) : Franssila, Sami
Titre(s) : Introduction to microfabrication [Texte électronique] / Sami Franssila
Édition : 2nd ed.
Publication : Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010
Description matérielle : 1 online resource (xiv, 518 pages)
Note(s) : Includes bibliographical references and index. - Print version record.
This accessible text is now fully revised and updated, providing an overview of fabrication
technologies and materials needed to realize modern microdevices. It demonstrates
how common microfabrication principles can be applied in different applications, to
create devices ranging from nanometer probe tips to meter scale solar cells, and a
host of microelectronic, mechanical, optical and fluidic devices in between. Latest
developments in wafer engineering, patterning, thin films, surface preparation and
bonding are covered
Sujet(s) : Systèmes microélectromécaniques
Micro-fabrication
Ingénierie
Indice(s) Dewey :
621.381 (23e éd.) = Électronique (technologie)
Identifiants, prix et caractéristiques : ISBN 9781119990413
Identifiant de la notice : ark:/12148/cb44656680p
Notice n° :
FRBNF44656680
(notice reprise d'un réservoir extérieur)
Table des matières : Micrometrology and Materials Characterization ; Simulation of Microfabrication Processes
; Silicon ; Thin-Film Materials and Processes ; Epitaxy ; Advanced Thin Films
; Pattern Generation ; Optical Lithography ; Advanced Lithography ; Etching ;
Wafer Cleaning and Surface Preparation ; Thermal Oxidation ; Diffusion ; Ion Implantation
; CMP: Chemical₆Mechanical Polishing ; Bonding ; Polymer Microprocessing ; Glass
Microprocessing ; Anisotropic Wet Etching ; Deep Reactive Ion Etching ; Wafer Engineering
; Special Processes and Materials ; Serial Microprocessing ; Process Integration
; MOS Transistor Fabrication ; Bipolar Transistors ; Multilevel Metallization ;
Surface Micromachining ; MEMS Process Integration ; Process Equipment ; Equipment
for Hot Processes ; Vacuum and Plasmas ; CVD and Epitaxy Equipment ; Cleanrooms
; Yield and Reliability ; Economics of Microfabrication ; Moore's Law and Scaling
Trends ; Microfabrication at Large ; Appendi
