Polymers for microelectronics : science and technology : proceedings of the International symposium on Polymers for microelectronics-science and technology - (PME' 89), Tokyo, Japan, October 29 to November 2, 1989 / [sponsored by the Society of radiation chemistry Japan, co-sponsored by the Society of polymer science Japan and the Chemical society of Japan ; [in cooperation with Japan society of applied physics, Technical association of photopolymers, Japanese research association for organic electronics materials... [et al.] ; ed . by Yoneho Tabata, Itaru Mita, Saburo Nonogaki...[et al.]

VCH

Polymers for microelectronics : resists and dielectrics : developed from a symposium sponsored by the Division of polymeric materials, science and engineering, Inc., of the American chemical society and the Society of polymer science, Japan, at the 203rd National meeting of the American chemical society, San Francisco, California, April 5-10, 1992 / ed. by Larry F. Thompson,... C. Grant Willson,... Seiichi Tagawa,...

American chemical society