Polymers for microelectronics : resists and dielectrics : developed from a symposium sponsored by the Division of polymeric materials, science and engineering, Inc., of the American chemical society and the Society of polymer science, Japan, at the 203rd National meeting of the American chemical society, San Francisco, California, April 5-10, 1992 / ed. by Larry F. Thompson,... C. Grant Willson,... Seiichi Tagawa,...

American chemical society